Conveyance system

ABSTRACT

There is provided a conveyance system that conveys a workpiece to each of plural processing apparatuses. The conveyance system includes a conveyance passage, an automated workpiece conveying vehicle that travels on the conveyance passage, a stock unit, and a control unit. The conveyance passage is set in a space directly above the processing apparatus across the plural processing apparatuses. The stock unit includes a workpiece conveying part that conveys the workpiece between a workpiece stocker that houses the workpiece supplied to the processing apparatus and the automated workpiece conveying vehicle.

BACKGROUND OF THE INVENTION Field of the Invention

The present invention relates to a conveyance system that conveys aworkpiece to a processing apparatus.

Description of the Related Art

In a manufacturing step of device chips incorporated into electronicequipment and so forth, a plate-shaped workpiece typified by asemiconductor wafer or resin package substrate is processed by variouskinds of processing apparatuses. When the workpiece is conveyed to thisprocessing apparatus, normally a cassette for conveyance that can houseplural workpieces is used.

Incidentally, in the above-described method in which plural workpiecesare housed in the cassette and are conveyed to a processing apparatus ata time, unprocessed workpieces housed in the cassette are made to waitwithout exception when the processing apparatus stops due to any cause.That is, processing of the unprocessed workpieces by another processingapparatus also becomes impossible and thus the efficiency of theprocessing greatly lowers.

To solve this problem, for example, it is preferable to conveyworkpieces to a processing apparatus one by one according to theoperation status of the processing apparatus. Thus, a conveyance systemhas been proposed in which plural processing apparatuses are coupled bya path for conveyance and a workpiece can be conveyed to each processingapparatus at an arbitrary timing (for example, refer to Japanese PatentLaid-open No. Hei 6-177244).

SUMMARY OF THE INVENTION

However, a conduit connecting part to which conduits are connected, adoor for maintenance, and so forth are disposed on a side surface ofeach processing apparatus, and the path for conveyance needs to bedesigned in such a manner as not to interfere with them when theabove-described conveyance system is constructed. For this reason,constructing the conveyance system is not necessarily easy and the pathfor conveyance also tends to become long.

Thus, an object of the present invention is to provide a conveyancesystem that can convey a workpiece to each of plural processingapparatuses and is also easy to construct.

In accordance with an aspect of the present invention, there is provideda conveyance system that conveys a workpiece to each of a plurality ofprocessing apparatuses. The conveyance system includes a conveyancepassage set in a space directly above the processing apparatus acrossthe plurality of processing apparatuses and an automated workpiececonveying vehicle including a workpiece support part that supports theworkpiece, a traveling mechanism disposed on the workpiece support part,and a receiver that receives a control signal. The automated workpiececonveying vehicle travels on the conveyance passage. The conveyancesystem further includes a stock unit including a workpiece conveyingpart that conveys the workpiece between a workpiece stocker that housesthe workpiece to be supplied to the processing apparatus and theautomated workpiece conveying vehicle and a receiver that receives acontrol signal and a control unit including a transmitter that transmitsa control signal to the processing apparatus, the automated workpiececonveying vehicle, and the stock unit, a receiver that receives anotification signal transmitted from the processing apparatus, and acontrol signal generator that generates the control signal to betransmitted from the transmitter. The control signal generator of thecontrol unit generates the control signal to be transmitted from thetransmitter of the control unit based on the notification signalreceived by the receiver of the control unit. The transmitter of thecontrol unit transmits the control signal generated by the controlsignal generator of the control unit to the processing apparatus, theautomated workpiece conveying vehicle, and the stock unit. The workpiececonveying part of the stock unit conveys the workpiece housed in theworkpiece stocker to the workpiece support part of the automatedworkpiece conveying vehicle based on the control signal received by thereceiver of the stock unit. The traveling mechanism of the automatedworkpiece conveying vehicle causes the automated workpiece conveyingvehicle to travel on the conveyance passage based on the control signalreceived by the receiver of the automated workpiece conveying vehicle toconvey the workpiece supported by the workpiece support part to theprocessing apparatus.

In this conveyance system, it is preferable that the conveyance passagebe set on an upper surface of the processing apparatus.

Furthermore, in this conveyance system, it is preferable that theconveyance passage be configured by coupling a plurality of passagemodules.

Moreover, in this conveyance system, the conveyance passage may includea leg part having a suction adhesion part that adheres to the processingapparatus by suction, and be fixed to the processing apparatus by thesuction adhesion part.

In addition, in this conveyance system, the processing apparatus mayhave a conduit connecting part to which conduits are connected or a doorfor maintenance on a side surface in some cases.

Furthermore, this conveyance system may have the followingconfiguration. Specifically, the conveyance system further includes anautomated blade conveying vehicle including a blade support part thatsupports a cutting blade used when the workpiece is processed by theprocessing apparatus, a traveling mechanism disposed on the bladesupport part, and a receiver that receives a control signal. Theautomated blade conveying vehicle travels on the conveyance passage. Thestock unit further includes a blade conveying part that conveys thecutting blade between a blade stocker that houses the cutting blade tobe supplied to the processing apparatus and the automated bladeconveying vehicle. The transmitter of the control unit further has afunction of transmitting the control signal to the automated bladeconveying vehicle. The transmitter of the control unit transmits thecontrol signal generated by the control signal generator of the controlunit to the processing apparatus, the automated workpiece conveyingvehicle, the automated blade conveying vehicle, and the stock unit. Theblade conveying part of the stock unit conveys the cutting blade housedin the blade stocker to the blade support part of the automated bladeconveying vehicle based on the control signal received by the receiverof the stock unit. The traveling mechanism of the automated bladeconveying vehicle causes the automated blade conveying vehicle to travelon the conveyance passage based on the control signal received by thereceiver of the automated blade conveying vehicle to convey the cuttingblade supported by the blade support part to the processing apparatus.

The conveyance system according to the aspect of the present inventionincludes the conveyance passage set across the plural processingapparatuses, the automated workpiece conveying vehicle including theworkpiece support part, the traveling mechanism, and the receiver, andthe stock unit including the workpiece conveying part and the receiver.

Thus, the workpiece can be conveyed to each of the plural processingapparatuses by conveying the workpiece housed in the workpiece stockerto the workpiece support part of the automated workpiece conveyingvehicle by the workpiece conveying part and causing this automatedworkpiece conveying vehicle to travel on the conveyance passage.

Furthermore, in the conveyance system according to the aspect of thepresent invention, the conveyance passage is set in a space directlyabove the processing apparatus. For this reason, the structures of theside surfaces of each processing apparatus do not need to be consideredwhen this conveyance passage is designed. That is, construction of theconveyance system becomes easy.

The above and other objects, features and advantages of the presentinvention and the manner of realizing them will become more apparent,and the invention itself will best be understood from a study of thefollowing description and appended claims with reference to the attacheddrawings showing preferred embodiments of the invention.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plan view illustrating a configuration example of aconveyance system according to embodiment 1;

FIG. 2 is a functional block diagram illustrating an example of theconnection relationship of the conveyance system according to embodiment1;

FIG. 3 is a side view schematically illustrating a configuration exampleof a stock unit according to embodiment 1;

FIG. 4A is a perspective view illustrating a configuration example of anautomated workpiece conveying vehicle;

FIG. 4B is a perspective view illustrating the automated workpiececonveying vehicle in the state in which a cassette is placed thereon;

FIG. 5 is a perspective view illustrating the appearance of a cuttingapparatus, a conveyance passage, and so forth according to embodiment 1;

FIG. 6 is a perspective view illustrating a configuration example of thecutting apparatus;

FIG. 7 is a perspective view illustrating how the conveyance passage isset on the cutting apparatus;

FIG. 8A, FIG. 8B, and FIG. 8C are plan views illustrating configurationexamples of a passage module;

FIG. 9 is a perspective view illustrating how the conveyance passage isformed from the passage modules;

FIG. 10A and FIG. 10B are sectional views illustrating how the passagemodules are coupled;

FIG. 11 is a bottom view illustrating a configuration example of thepassage module;

FIG. 12 is a perspective view illustrating the structure of the cassetteand so forth;

FIG. 13A, FIG. 13B, and FIG. 13C are sectional views illustrating how aframe that supports a workpiece is carried out from the cassette;

FIG. 14 is a functional block diagram for explaining an example ofoperation and so forth of the conveyance system according to embodiment1;

FIG. 15 is a functional block diagram illustrating an example of theconnection relationship of a conveyance system according to embodiment2;

FIG. 16 is a side view illustrating a configuration example of a stockunit according to embodiment 2;

FIG. 17 is a perspective view illustrating a configuration example of anautomated blade conveying vehicle;

FIG. 18 is a perspective view illustrating the appearance of a cuttingapparatus and so forth according to embodiment 2;

FIG. 19 is an exploded perspective view illustrating a configurationexample of a blade changer;

FIG. 20 is a functional block diagram for explaining an example ofoperation and so forth of the conveyance system according to embodiment2;

FIG. 21 is a perspective view schematically illustrating how thecassette is carried out from the automated workpiece conveying vehiclein a conveyance system according to embodiment 3; and

FIG. 22 is a perspective view schematically illustrating how thecassette is carried in to the cutting apparatus in the conveyance systemaccording to embodiment 3.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Embodiments of the present invention will be described with reference tothe accompanying drawings, in the following respective embodiments,conveyance systems that convey workpieces and so forth to plural cuttingapparatuses will be described. However, it suffices for the conveyancesystem of the present invention to be configured to be capable ofconveying workpieces and so forth to plural arbitrary processingapparatuses. That is, the conveyance destination of the workpiece and soforth may be a processing apparatus other than a cutting apparatus.

For example, the conveyance system of the present invention isconfigured to be capable of conveying workpieces to plural laserprocessing apparatuses in some cases. Furthermore, for example, theconveyance system of the present invention is configured to be capableof conveying a workpiece sequentially to plural kinds of processingapparatuses used for a series of processing in other cases.

Embodiment 1

FIG. 1 is a plan view illustrating a configuration example of aconveyance system 2 according to the present embodiment and FIG. 2 is afunctional block diagram illustrating an example of the connectionrelationship of the conveyance system 2. As illustrated in FIG. 1, theconveyance system 2 according to the present embodiment includes aconveyance passage 6 for conveying a plate-shaped workpiece 11 processedby a cutting apparatus (processing apparatus) 4.

The workpiece 11 is a wafer that is composed of a semiconductor materialsuch as silicon and has a circular disc shape, for example. The frontsurface side of this workpiece 11 is segmented into plural small regionsby plural planned dividing lines (streets) intersecting each other and adevice such as an integrated circuit (IC) or a micro electro mechanicalsystem (MEMS) is formed in each small region.

A tape (dicing tape) 13 with a diameter larger than the workpiece 11 isstuck to the back surface side of the workpiece 11. The peripheral partof the tape 13 is fixed to a ring-shaped frame 15 that surrounds theworkpiece 11. The workpiece 11 is conveyed to the cutting apparatus 4 inthe state of being supported by the frame 15 with the intermediary ofthis tape 13.

Although the wafer that is composed of a semiconductor material such assilicon and has a circular disc shape is employed as the workpiece 11 inthe present embodiment, there is no limit to the material, shape,structure, size, and so forth of the workpiece 11. For example, it isalso possible to use a substrate or the like composed of a material suchas another semiconductor, ceramic, resin, or metal as the workpiece 11.Similarly, there is no limit also to the kind, quantity, shape,structure, size, arrangement, and so forth of the devices. The devicesdo not have to be formed on the workpiece 11.

The cutting apparatus 4 that processes this workpiece 11 is connected tothe conveyance system 2 as the conveyance destination of the workpiece11. However, the cutting apparatus 4 is not necessarily a constituentelement of the conveyance system 2. Thus, the cutting apparatus 4 may bechanged or omitted according to the form of use of the conveyance system2 as described above.

Furthermore, for convenience of description, only one cutting apparatus4 a is illustrated in FIG. 1 and two cutting apparatuses 4 a and 4 b areillustrated in FIG. 2. However, in the present embodiment, two or morecutting apparatuses 4 are necessary as the conveyance destination of theworkpiece 11. That is, the number of processing apparatuses connected tothe conveyance system 2 is two or more.

The conveyance passage 6 is disposed across plural cutting apparatuses 4so that the workpiece 11 can be conveyed to each cutting apparatus 4.That is, the plural cutting apparatuses 4 are coupled to each otherthrough the conveyance passage 6. Furthermore, the conveyance passage 6is disposed in a space directly above the cutting apparatus 4. For thisreason, the conveyance passage 6 does not interfere with conduits 21 andso forth connected to a side surface of each cutting apparatus 4.

Below the conveyance passage 6, a stock unit 8 that can house pluralworkpieces 11 is disposed besides the cutting apparatus 4. The workpiece11 housed in the stock unit 8 is carried in to an automated workpiececonveying vehicle 10 at an arbitrary timing. The automated workpiececonveying vehicle 10 travels on the conveyance passage 6 and conveys theworkpiece 11 to each cutting apparatus 4. Although three automatedworkpiece conveying vehicles 10 a, 10 b, and 10 c are illustrated inFIG. 1 and two automated workpiece conveying vehicles 10 a and 10 b areillustrated in FIG. 2, there is no limit to the number of automatedworkpiece conveying vehicles 10.

As illustrated in FIG. 2, to the cutting apparatuses 4, the stock unit8, and the automated workpiece conveying vehicles 10, a control unit 12that controls operation of them is wirelessly connected. However, itsuffices for the control unit 12 to be configured to be capable ofcontrolling operation of the cutting apparatuses 4, the stock unit 8,and the automated workpiece conveying vehicles 10 and the control unit12 may be connected to them in a wired manner in some cases.

FIG. 3 is a side view schematically illustrating a configuration exampleof the stock unit 8. As illustrated in FIG. 3, the stock unit 8 includesa casing 14 that houses various constituent elements. In this FIG. 3,only the contour of the casing 14 is illustrated for convenience ofdescription.

In the casing 14, a first cassette support base 16 that moves up anddown by a first raising-lowering mechanism (not illustrated) of a ballscrew type is disposed, for example. A cassette (workpiece stocker) 18that can house plural workpieces 11 is placed on the upper surface ofthe first cassette support base 16. This cassette 18 houses theworkpieces 11 in the state of being supported by the frame 15 with theintermediary of the tape 13 as described above.

A push-pull arm 20 that can move while grasping the frame 15 is disposedon a lateral side of the first cassette support base 16. For example,when the height of the frame 15 housed in the cassette 18 is adjusted tothe height of the push-pull arm 20 by the first raising-loweringmechanism and the frame 15 in the cassette 18 is grasped by thispush-pull arm 20, the frame 15 can be drawn out to the outside of thecassette 18.

A pair of guide rails 22 made to get closer to and further away fromeach other while the state in which the guide rails 22 are parallel toeach other is kept are disposed at positions that sandwich the push-pullarm 20. Each guide rail 22 includes a support surface that supports theframe 15 from the lower side and a side surface substantiallyperpendicular to the support surface. The guide rails 22 sandwich theframe 15 drawn out of the cassette 18 by the push-pull arm 20 and adjustthe frame 15 to a predetermined position.

On a lateral side of the push-pull arm 20 and the pair of guide rails22, a second cassette support base 26 that moves up and down by a secondraising-lowering mechanism 24 of a ball screw type is disposed, forexample. A cassette (cassette for conveyance) 28 that can house oneworkpiece 11 is placed on the upper surface of this second cassettesupport base 26. The cassette 28 may be configured to be capable ofhousing two or more workpieces 11.

The frame 15 adjusted to the predetermined position by the pair of guiderails 22 is grasped by the push-pull arm 20 again and is inserted from alateral side into the cassette 28 on the second cassette support base 26whose height is adjusted by the second raising-lowering mechanism 24.When the workpiece 11 is housed in the cassette 28, the secondraising-lowering mechanism 24 raises the second cassette support base26.

In a region directly above the second cassette support base 26, anopening 14 b that vertically penetrates a ceiling 14 a of the casing 14is made. This opening 14 b is formed to have shape and size that atleast allow the cassette 28 placed on the second cassette support base26 to pass through the opening 14 b. Thus, by raising the secondcassette support base 26 by the second raising-lowering mechanism 24,the cassette 28 that houses the workpiece 11 can be exposed to theoutside of the casing 14 through the opening 14 b.

A cassette conveying arm (workpiece conveying part) 30 that conveys thecassette 28 exposed at the opening 14 b to the automated workpiececonveying vehicle 10 that has stopped near this opening 14 b is disposedoutside the casing 14. A control apparatus 32 for controlling operationof the stock unit 8 is connected to constituent elements such as thefirst raising-lowering mechanism, the push-pull arm 20, the pair ofguide rails 22, the second raising-lowering mechanism 24, and thecassette conveying arm 30.

A receiver 34 that receives a signal for control (control signal)transmitted from the control unit 12 of the conveyance system 2 and atransmitter 36 that transmits a signal for notification (notificationsignal) to the control unit 12 are further connected to the controlapparatus 32. The control apparatus 32 controls the operation of thestock unit 8 based on the signal received by the receiver 34.Furthermore, the control apparatus 32 transmits the necessary signal tothe control unit 12 through the transmitter 36.

FIG. 4A is a perspective view illustrating a configuration example ofthe automated workpiece conveying vehicle 10 and FIG. 4B is aperspective view illustrating the automated workpiece conveying vehicle10 in the state in which the cassette 28 is placed thereon. Asillustrated in FIG. 4A, the automated workpiece conveying vehicle 10includes a tray-shaped chassis (workpiece support part) 38. A recess 38a corresponding to the shape and size of the cassette 28 is made on theupper surface side of the chassis 38 and the cassette 28 conveyed by thecassette conveying arm 30 is placed in this recess 38 a of the chassis38.

Plural (in the present embodiment, four) wheels (traveling mechanism) 40are attached to the lower surface side of the chassis 38. Each wheel 40is coupled to a rotational drive source such as a motor and rotates. Byrotating these wheels 40 by the rotational drive source, the automatedworkpiece conveying vehicle 10 travels on the conveyance passage 6. Asthe wheels 40, so-called Mecanum wheels in which plural inclinedbarrel-shaped (cylinder-shaped) rotating bodies are attached to theouter circumferential surface in contact with the conveyance passage 6,or the like, can be used.

A control apparatus 42 that controls operation of the automatedworkpiece conveying vehicle 10 is disposed on a side surface of thechassis 38. To this control apparatus 42, a receiver 44 that receives asignal for control (control signal) transmitted from the control unit 12of the conveyance system 2 and a transmitter 46 that transmits a signalfor notification (notification signal) to the control unit 12 areconnected. The control apparatus 42 controls the operation (traveling)of the automated workpiece conveying vehicle 10 based on the signalreceived by the receiver 44. Furthermore, the control apparatus 42transmits the necessary signal to the control unit 12 through thetransmitter 46.

FIG. 5 is a perspective view illustrating the appearance of the cuttingapparatus 4, the conveyance passage 6, and so forth and FIG. 6 is aperspective view illustrating a configuration example of the cuttingapparatus 4. As illustrated in FIG. 5 and FIG. 6, the cutting apparatus4 includes a pedestal 48 that supports the respective constituentelements. An opening 48 a is formed at a corner part of the pedestal 48and a cassette support base 50 that moves up and down by araising-lowering mechanism (not illustrated) is disposed in a regioncorresponding to this opening 48 a. The above-described cassette 28 isplaced on the upper surface of the cassette support base 50. In FIG. 5and FIG. 6, only the contour of the cassette 28 is illustrated forconvenience of description.

As illustrated in FIG. 6, an opening 48 b that is long in an X-axisdirection (front-rear direction, processing feed direction) is formed ona lateral side of the opening 48 a. An X-axis movement mechanism(processing feed unit) 52 of a ball screw type and a dust-proof anddrip-proof cover 54 that covers the upper part of the X-axis movementmechanism 52 are disposed in the opening 48 b. The X-axis movementmechanism 52 includes an X-axis movement table 52 a and moves thisX-axis movement table 52 a in the X-axis direction.

A chuck table (holding table) 56 that sucks and holds the workpiece 11is disposed on the X-axis movement table 52 a. The chuck table 56 iscoupled to a rotational drive source (not illustrated) such as a motorand rotates around a rotation axis substantially parallel to a Z-axisdirection (vertical direction, cutting-in feed direction). Furthermore,the chuck table 56 moves in the X-axis direction (processing feed) bythe above-described X-axis movement mechanism 52.

The upper surface of the chuck table 56 functions as a holding surface56 a for holding the workpiece 11. The holding surface 56 a is connectedto a suction source (not illustrated) through a suction path (notillustrated) formed inside the chuck table 56 and so forth. Furthermore,four clamps 58 for fixing the frame 15 that supports the workpiece 11from four sides are disposed around the chuck table 56.

Above the opening 48 b, a pair of guide rails 60 made to get closer toand further away from each other while the state in which the guiderails 60 are parallel to a Y-axis direction (right-left direction,indexing feed direction) is kept are disposed. The pair of guide rails60 each include a support surface that supports the frame 15 from thelower side and a side surface substantially perpendicular to the supportsurface. The guide rails 60 sandwich the frame 15 drawn out of thecassette 28 in the X-axis direction and adjust the frame 15 to apredetermined position.

A first support structure 62 with a gate shape is disposed to straddlethe opening 48 b over the pedestal 48. A first rail 64 along the Y-axisdirection is fixed to the front surface of the first support structure62 (surface on the side of the guide rails 60) and a first conveyingunit 68 is coupled to this first rail 64 with the intermediary of afirst movement mechanism 66 and so forth.

For example, the first conveying unit 68 gets contact with the uppersurface of the frame 15 to suck and hold this frame 15 and moves up anddown by the first movement mechanism 66. In addition, the firstconveying unit 68 moves in the Y-axis direction along the first rail 64.A grasping mechanism 68 a for grasping the frame 15 is disposed on thefirst conveying unit 68 on the side of the opening 48 a.

For example, when the frame 15 is grasped by the grasping mechanism 68 aand the first conveying unit 68 is moved in the Y-axis direction, theframe 15 in the cassette 28 can be drawn out to the pair of guide rails60 or the frame 15 on the pair of guide rails 60 can be inserted intothe cassette 28. After the position of the frame 15 is adjusted by thepair of guide rails 60, this frame 15 (workpiece 11) is carried in tothe chuck table 56 by the first conveying unit 68.

Furthermore, on the front surface of the first support structure 62, asecond rail 70 along the Y-axis direction is fixed to the upper side ofthe first rail 64. A second conveying unit 74 is coupled to this secondrail 70 with the intermediary of a second movement mechanism 72 and soforth. For example, the second conveying unit 74 gets contact with theupper surface of the frame 15 to suck and hold this frame 15 and movesup and down by the second movement mechanism 72. In addition, the secondconveying unit 74 moves in the Y-axis direction along the second rail70.

A second support structure 76 with a gate shape is disposed on the rearside of the first support structure 62. Two sets of cutting units 80 areeach disposed on the front surface of the second support structure 76(surface on the side of the first support structure 62) with theintermediary of a Y-axis/Z-axis movement mechanism (indexing feed unit,cutting-in feed unit) 78. The cutting unit 80 moves in the Y-axisdirection (indexing feed) and moves in the Z-axis direction (cutting-infeed) by the Y-axis/Z-axis movement mechanism 78.

Each cutting unit 80 includes a spindle (not illustrated) that serves asa rotating shaft substantially parallel to the Y-axis direction. Acutting blade 82 with a circular ring shape is mounted to one end sideof the spindle. A rotational drive source (not illustrated) such as amotor is coupled to the other end side of each spindle. Furthermore, anozzle for supplying a cutting liquid such as purified water to theworkpiece 11 and the cutting blade 82 is disposed near the cutting blade82.

While the cutting liquid is supplied from this nozzle, the rotatedcutting blade 82 is caused to cut into the workpiece 11 held by thechuck table 56. Thereby, the workpiece 11 can be cut. An imaging unit(camera) 84 for imaging the workpiece 11 held by the chuck table 56 andso forth is disposed at a position adjacent to the cutting unit 80. Thisimaging unit 84 also moves in the Y-axis direction and moves in theZ-axis direction by the Y-axis/Z-axis movement mechanism 78.

A cleaning unit 86 is disposed at a position on the opposite side to theopening 48 a across the opening 48 b. The cleaning unit 86 includes aspinner table 88 that sucks and holds the workpiece 11 in a cleaningspace with a cylindrical shape. A rotational drive source (notillustrated) that rotates the spinner table 88 at a predetermined speedis coupled to the lower part of the spinner table 88.

A spray nozzle 90 that sprays a fluid for cleaning (typically, mixedfluid obtained by mixing water and air) toward the workpiece 11 held bythe spinner table 88 is disposed above the spinner table 88. Theworkpiece 11 can be cleaned by rotating the spinner table 88 that holdsthe workpiece 11 and spraying the fluid for cleaning from the spraynozzle 90.

After the workpiece 11 is cut by the cutting unit 80, the frame 15 isconveyed to the cleaning unit 86 by the second conveying unit 74, forexample. After the workpiece 11 is cleaned by the cleaning unit 86, forexample, the frame 15 is placed on the pair of guide rails 60 by thefirst conveying unit 68 and thereafter this frame 15 is grasped by thegrasping mechanism 68 a and is housed in the cassette 28.

As illustrated in FIG. 5, the upper surface side of the pedestal 48 iscovered by a cover 92 and the above-described respective constituentelements are housed inside the cover 92. An opening 92 b that verticallypenetrates a ceiling 92 a of the cover 92 is made in a region directlyabove the opening 48 a. Thus, when the cassette support base 50 israised by the raising-lowering mechanism, the upper surface of thecassette support base 50 can be exposed to the outside of the cover 92through this opening 92 b. The shape and size of the opening 92 b arethe same as the shape and size of the opening 48 a made in the pedestal48, for example.

On the ceiling 92 a of the cover 92, a cassette conveying arm 94 thatconveys the cassette 28 between the cassette support base 50 located ata height equivalent to that of the opening 92 b and the automatedworkpiece conveying vehicle 10 that has stopped near the opening 92 b isdisposed, for example. This cassette conveying arm 94 is connected to acontrol apparatus 96 together with the raising-lowering mechanism and soforth, the raising-lowering mechanism raises and lowers the cassettesupport base 50 (FIG. 5).

A receiver 98 that receives a signal for control (control signal)transmitted from the control unit 12 of the conveyance system 2 and atransmitter 100 that transmits a signal for notification (notificationsignal) to the control unit 12 are further connected to the controlapparatus 96. The control apparatus 96 controls the respectiveconstituent elements of the above-described cutting apparatus 4 based onthe signal received by the receiver 98 and so forth, for example.

A conduit connecting part 48 c (FIG. 5) to which various conduits 21 areconnected is disposed in a sidewall of the pedestal 48. Furthermore,doors 92 c (FIG. 5) opened and closed in maintenance or the like aredisposed in a sidewall of the cover 92. Moreover, an operation panel(not illustrated), a display (not illustrated), and so forth may bedisposed on a sidewall of the cover 92.

FIG. 7 is a perspective view illustrating how the conveyance passage 6of the conveyance system is set on the cutting apparatus 4. Asillustrated in FIG. 7 and so forth, the conveyance passage 6 of theconveyance system 2 according to the present embodiment is mounted tothe upper surface side of the ceiling 92 a of the cover 92 which thecutting apparatus 4 has. That is, the conveyance passage 6 is set in aspace directly above the cutting apparatus 4.

This eliminates interference of the conveyance passage 6 with thestructures such as the conduit connecting part 48 c and the doors 92 cdisposed in side surfaces of the cutting apparatus 4. That is, thestructures of the side surfaces of the cutting apparatus 4 do not needto be considered when the conveyance passage 6 is designed. For thisreason, construction of the conveyance system 2 becomes easy.

FIG. 8A is a plan view illustrating a configuration example of a passagemodule 6 a used for the conveyance passage 6. FIG. 8B is a plan viewillustrating a configuration example of a passage module 6 b. FIG. 8C isa plan view illustrating a configuration example of a passage module 6c. The conveyance passage 6 is configured by combining the pluralpassage modules 6 a, 6 b, and 6 c illustrated in FIG. 8A, FIG. 8B, andFIG. 8C, for example.

The respective passage modules 6 a, 6 b, and 6 c each include a passagepart 102 having an upper surface that is suitable for traveling of theautomated workpiece conveying vehicle 10 and has high flatness and aguide part 104 that is disposed at ends of the passage part 102 in thewidth direction and is along this passage part 102. The height of theupper end of the guide part 104 from the passage part 102 is higher thanthe height of the wheels 40 of the automated workpiece conveying vehicle10, for example. This can prevent the automated workpiece conveyingvehicle 10 that travels on the passage part 102 from falling off fromthe passage part 102.

The passage module 6 a of FIG. 8A further has a waiting part 106 forallowing the automated workpiece conveying vehicle 10 to wait, and isset directly above the cutting apparatus 4 or the like that exchangesthe workpiece 11 (cassette 28) with the automated workpiece conveyingvehicle 10, for example. Meanwhile, the passage module 6 b of FIG. 8B isformed into a straight line shape and the passage module 6 c of FIG. 8Cis formed into a right-angle shape suitable for a corner.

The passage modules 6 b and 6 c are used to join adjacent two passagemodules 6 a, for example. However, there is no limit to the kind,quantity, arrangement (relationship of the connection), and so forth ofthe passage module configuring the conveyance passage 6. For example,two passage modules 6 a may be joined by yet another passage module 6 a.Furthermore, for example, it is also possible to use a passage modulewith a circular arc shape (curved shape) instead of the passage module 6c with the right-angle shape.

FIG. 9 is a perspective view illustrating how the conveyance passage 6is formed from the passage module 6 a and the passage module 6 b. FIG.10A and FIG. 10B are sectional views illustrating how the passage module6 a and the passage module 6 b are coupled. Furthermore, FIG. 11 is abottom view illustrating a configuration example of the passage module 6b.

As illustrated in FIG. 9, a pair of angles (brackets) 108 whose sectionhas an L-shape are disposed at an end part of the lower surface of thepassage part 102 in the length direction (end part in the directionalong the conveyance passage 6). Each angle 108 includes asubstantially-horizontal support surface 108 a and a side surface 108 bsubstantially perpendicular to the support surface 108 a, and is fixedto the lower surface of the passage part 102 in such a manner that thelongitudinal direction of each angle 108 is along the conveyance passage6.

When the passage module 6 a and the passage module 6 b are coupled,first, as illustrated in FIG. 10A, an end part of the passage part 102configuring the passage module 6 a in the longitudinal direction and anend part of the passage part 102 configuring the passage module 6 b inthe longitudinal direction are brought sufficiently close to each other.Then, as illustrated in FIG. 10B, coupling pieces 110 are each insertedinto the angle 108 disposed on the passage part 102 configuring thepassage module 6 a and the angle 108 disposed on the passage part 102configuring the passage module 6 b.

For example, the coupling piece 110 includes a rod part 110 a longerthan the length obtained by adding the length of the angle 108 of thepassage module 6 a and the length of the angle 108 of the passage module6 b and ring parts 110 b that are disposed at both ends of the rod part110 a and have an opening at the center. The rod parts 110 a of thesecoupling pieces 110 are inserted into the angles 108.

After the rod parts 110 a are inserted into the angles 108, bolts 112are fastened into bolt holes (not illustrated) on the lower surface sideof the passage part 102 through the openings of the ring parts 110 b.This can couple the passage module 6 a and the passage module 6 bthrough the coupling pieces 110. The passage module 6 c is also coupledto other passage modules (passage module 6 a, passage module 6 b, and soforth) by the same procedure.

Mounting of the passage modules 6 a, 6 b, and 6 c to the cuttingapparatus 4 is executed with the intermediary of a leg member 114illustrated in FIG. 9, FIG. 11, and so forth, for example. The legmember 114 includes a plate-shaped base part 114 a, a column part 114 bthat protrudes from the vicinity of the center of a surface of the basepart 114 a on one side and has a column shape, and a suction adhesionpart 114 c (FIG. 11) that is mounted to the tip of the column part 114 band has a suction cup shape.

In a region that does not overlap with the column part 114 b in the basepart 114 a, four openings 114 d that penetrate this base part 114 a inthe thickness direction are formed. Furthermore, in the lower surfacesof the passage parts 102 configuring the passage modules 6 a, 6 b, and 6c, bolt holes 102 a (FIG. 11) corresponding to the respective openings114 d are formed.

Thus, when the surface of the base part 114 a on the other side isbrought into contact with the lower surface of the passage part 102 andbolts 116 are fastened into the bolt holes 102 a through the openings114 d, the leg member 114 can be fixed to the passage module 6 a, 6 b,or 6 c. There is no limit to the quantity, arrangement, and so forth ofthe openings 114 d and the bolt holes 102 a.

As illustrated in FIG. 11, four bolt holes 102 a corresponding to fouropenings 114 d of the base part 114 a are formed in each of pluralregions of the lower surface of the passage part 102 in the passagemodule 6 b of the present embodiment, and the leg member 114 can bemounted to an arbitrary region. This is similar also to the otherpassage modules 6 a and 6 c.

That is, the leg member 114 is mounted to any region selected from theplural regions of the lower surface of the passage part 102. It isdesirable to mount plural leg members 114 to each of the passage modules6 a, 6 b, and 6 c. This makes it easy to stabilize the position of theconveyance passage 6 relative to the cutting apparatus 4.

When the passage module 6 a, 6 b, or 6 c is mounted to the cuttingapparatus 4, for example, the position of the passage module 6 a, 6 b,or 6 c is adjusted to the cover 92 of the cutting apparatus 4 and thesuction adhesion parts 114 c of the leg members 114 are pressed againstthe upper surface of the ceiling 92 a of the cover 92 as illustrated inFIG. 7. This can cause the suction adhesion parts 114 c to adhere to theupper surface of the ceiling 92 a of the cover 92 by suction and mountthe arbitrary passage module 6 a, 6 b, or 6 c to the cover 92. That is,the arbitrary passage module 6 a, 6 b, or 6 c is mounted to the cover 92of the cutting apparatus 4 with the intermediary of the leg members 114.

All the passage modules 6 a, 6 b, and 6 c do not necessarily have to bemounted to the cutting apparatus 4. For example, the passage modulelocated between two cutting apparatuses 4 is often supported by only thepassage module adjacent with the intermediary of the coupling piece 110.Furthermore, as illustrated in FIG. 1, an information providing part 102b such as an identification code typified by a two-dimensional code or awireless tag is set on the passage part 102 of the passage modulemounted to the cutting apparatus 4, the stock unit 8, or the like. Thisinformation providing part 102 b is used for a check of the position ofthe automated workpiece conveying vehicle 10 and so forth, for example.

Next, the structure of the cassette 28 and so forth used for conveyanceof the workpiece 11 will be described. FIG. 12 is a perspective viewillustrating the structure of the cassette 28 and so forth. The cassette28 includes a box body 118 with a size that allows housing of the frame15 that supports the workpiece 11. This box body 118 has a bottom plate120 for supporting the workpiece 11 and the frame 15.

The bottom plate 120 is formed into a rectangular shape in plan view andthe lower end sides of a side plate 122, a side plate 124, and a sideplate 126 are fixed to positions corresponding to three sides of thebottom plate 120. A top plate 128 with the same shape as the bottomplate 120 is fixed to the upper end sides of the side plate 122, theside plate 124, and the side plate 126. That is, the box body 118 isformed into a hollow rectangular parallelepiped shape having an opening118 a in one of the four side surfaces.

It is desirable for the top plate 128 to be formed of a material such asresin or glass that allows transmission of a visible light ray with awavelength of about 360 nm to 830 nm. This makes it possible todiscriminate the kind and so forth of the workpiece 11 housed in the boxbody 118 from the outside of the cassette 28, for example. When the kindand so forth of the workpiece 11 are discriminated, an identificationcode 17 such as a barcode drawn on the workpiece 11 may be read.

Furthermore, two movement restricting members 130 a and 130 b forrestricting movement of the frame 15 housed in the box body 118 to theoutside are disposed in a region on the bottom plate 120 on the side ofthe opening 118 a. The two movement restricting members 130 a and 130 bare each formed into a rectangular parallelepiped shape and are disposedin such a manner that the longitudinal direction of the respectivemovement restricting members 130 a and 130 b is along the lower edge ofthe opening 118 a.

The height of the two movement restricting members 130 a and 130 b islower than the height of the opening 118 a and a gap for carrying in andout the workpiece 11 and the frame 15 is formed between the respectivemovement restricting members 130 a and 130 b and the top plate 128. Thetwo movement restricting members 130 a and 130 b are not in contact witheach other. That is, a predetermined gap 130 c is formed between themovement restricting member 130 a and the movement restricting member130 b.

At part of the bottom plate 120, plural openings 120 a that penetratethis bottom plate 120 in the thickness direction and have a rectangularshape in plan view are formed. Each opening 120 a is made in a regiondirectly below the frame 15 housed in the box body 118, for example.That is, each opening 120 a is formed at a position overlapping with theframe 15 housed in the box body 118 in plan view.

As illustrated in FIG. 12, for example, plural protrusions 50 a thatcorrespond to the shape of the opening 120 a and have a rectangularparallelepiped shape are disposed on the upper surface of the cassettesupport base 50 which the cutting apparatus 4 has. Each protrusion 50 ais disposed at the position corresponding to the opening 120 a of thecassette 28 placed on the upper surface of the cassette support base 50.Thus, for example, when the cassette 28 on the automated workpiececonveying vehicle 10 is conveyed by the cassette conveying arm 94 and isplaced on the upper surface of the cassette support base 50, theprotrusions 50 a are inserted into the openings 120 a of this cassette28.

As a result, the frame 15 housed in the cassette 28 is pushed up to aposition higher than the movement restricting members 130 a and 130 brelatively by the protrusions 50 a, and the state in which the frame 15can be carried out and in from the gap between the movement restrictingmembers 130 a and 130 b and the top plate 128 is obtained. There is noparticular limit to the shape and so forth of the openings 120 a and theprotrusions 50 a. Furthermore, although only the cassette support base50 which the cutting apparatus 4 has is exemplified in FIG. 12, thestructure of the second cassette support base 26 which the stock unit 8has and so forth are also the same, for example.

FIG. 13A, FIG. 13B, and FIG. 13C are sectional views illustrating howthe frame 15 that supports the workpiece 11 is carried out from thecassette 28. For example, when the frame 15 is carried out from thecassette 28 in the cutting apparatus 4, the cassette 28 is placed on theupper surface of the cassette support base 50 in such a manner that theprotrusions 50 a are inserted into the openings 120 a as illustrated inFIG. 13A. As a result, the frame 15 housed in the cassette is pushed upto a position higher than the movement restricting members 130 a and 130b relatively by the protrusions 50 a.

Next, the relative height between the cassette support base 50 and thegrasping mechanism 68 a is adjusted in such a manner that the height ofthe upper surface of the protrusions 50 a of the cassette support base50 becomes substantially the same as that of the grasping mechanism 68 aof the first conveying unit 68. Then, as illustrated in FIG. 13B, thegrasping mechanism 68 a of the first conveying unit 68 is inserted fromthe opening 118 a into the cassette 28. Specifically, the firstconveying unit 68 is horizontally moved and the grasping mechanism 68 ais inserted into the gap 130 c between the movement restricting member130 a and the movement restricting member 130 b.

Thereafter, the frame 15 is grasped by the grasping mechanism 68 a, andthe first conveying unit 68 is horizontally moved to draw this graspingmechanism 68 a from the cassette 28 as illustrated in FIG. 13C. Thereby,the frame 15 is carried out from the cassette 28. The carried-out frame15 is carried in to the chuck table 56 after the position is adjusted bythe pair of guide rails 60, for example.

Next, an example of operation and so forth of the conveyance system 2according to the present embodiment will be described. FIG. 14 is afunctional block diagram for explaining the example of operation and soforth of the conveyance system 2. For example, when the situation inwhich the new workpiece 11 is necessary occurs, the control apparatus 96of the cutting apparatus 4 generates a notification signal (workpiecerequest signal) for notifying this. The notification signal (workpiecerequest signal) generated by the control apparatus 96 is transmittedfrom the transmitter 100 to the control unit 12.

As illustrated in FIG. 14, the control unit 12 includes a control part(control signal generator) 132 that generates a control signal forexecuting various kinds of control. To this control part 132, a receiver134 that receives notification signals transmitted from the cuttingapparatus 4, the stock unit 8, the automated workpiece conveying vehicle10, and so forth and a transmitter 136 that transmits control signals tothe cutting apparatus 4, the stock unit 8, the automated workpiececonveying vehicle 10, and so forth are connected.

When receiving the notification signal (workpiece request signal)transmitted from the transmitter 100 of the cutting apparatus 4, thereceiver 134 of the control unit 12 sends it to the control part 132.When checking the notification signal (workpiece request signal) fromthe cutting apparatus 4, the control part 132 issues, to the automatedworkpiece conveying vehicle 10, an instruction to wait at a position atwhich the workpiece 11 can be received from the stock unit 8.Specifically, the control part 132 generates a control signal (firstwait instruction signal) equivalent to this instruction and sends itfrom the transmitter 136 to the automated workpiece conveying vehicle10.

When receiving the control signal (first wait instruction signal) fromthe control unit 12, the receiver 44 of the automated workpiececonveying vehicle 10 sends it to the control apparatus 42. The controlapparatus 42 controls operation of the wheels (traveling mechanism) 40and so forth based on this control signal (first wait instructionsignal) and causes the automated workpiece conveying vehicle 10 totravel along the conveyance passage 6.

As illustrated in FIG. 14, a reader 138 for reading information of theinformation providing part 102 b set on the conveyance passage 6 isconnected to the control apparatus 42 of the automated workpiececonveying vehicle 10. Thus, the control apparatus 42 can check theposition of the automated workpiece conveying vehicle 10 by reading theinformation of the information providing part 102 b by the reader 138.

When confirming that the automated workpiece conveying vehicle 10 hasmoved to near the stock unit 8, the control apparatus 42 stops thewheels 40 and so forth. Furthermore, the control apparatus 42 generatesa notification signal (first standby signal) for notifying that theautomated workpiece conveying vehicle 10 is waiting at a position atwhich the workpiece 11 can be received. The notification signal (firststandby signal) generated by the control apparatus 42 is transmittedfrom the transmitter 46 to the control unit 12.

When receiving the notification signal (first standby signal)transmitted from the transmitter 46 of the automated workpiece conveyingvehicle 10, the receiver 134 of the control unit 12 sends it to thecontrol part 132. When checking the notification signal (first standbysignal) from the automated workpiece conveying vehicle 10, the controlpart 132 issues, to the stock unit 8, an instruction to convey theworkpiece 11 to the automated workpiece conveying vehicle 10.Specifically, the control part 132 generates a control signal (firstconveyance instruction signal) equivalent to this instruction and sendsit from the transmitter 136 to the stock unit 8.

When receiving the control signal (first conveyance instruction signal)from the control unit 12, the receiver 34 of the stock unit 8 sends itto the control apparatus 32. The control apparatus 32 controls operationof the cassette conveying arm 30 and so forth based on this controlsignal (first conveyance instruction signal) to place the cassette 28 inwhich the workpiece 11 is housed on the chassis 38 of the automatedworkpiece conveying vehicle 10.

When the conveyance of the cassette 28 to the automated workpiececonveying vehicle 10 has been completed, the control apparatus 32generates a notification signal (first conveyance completion signal) fornotifying that the conveyance of the cassette 28 to the automatedworkpiece conveying vehicle 10 has been completed. The notificationsignal (first conveyance completion signal) generated by the controlapparatus 32 is transmitted from the transmitter 36 to the control unit12.

When receiving the notification signal (first conveyance completionsignal) transmitted from the transmitter 36 of the stock unit 8, thereceiver 134 of the control unit 12 sends it to the control part 132.When checking the notification signal (first conveyance completionsignal) from the stock unit 8, the control part 132 issues, to theautomated workpiece conveying vehicle 10, an instruction to move to aposition at which the workpiece 11 can be transferred to the cuttingapparatus 4 and wait. Specifically, the control part 132 generates acontrol signal (second wait instruction signal) equivalent to thisinstruction and sends it from the transmitter 136 to the automatedworkpiece conveying vehicle 10.

When receiving the control signal (second wait instruction signal) fromthe control unit 12, the receiver 44 of the automated workpiececonveying vehicle 10 sends it to the control apparatus 42. The controlapparatus 42 controls operation of the wheels 40 and so forth based onthis control signal (second wait instruction signal) and causes theautomated workpiece conveying vehicle 10 to travel along the conveyancepassage 6.

When confirming that the automated workpiece conveying vehicle 10 hasmoved to near the cutting apparatus 4, the control apparatus 42 stopsthe wheels 40 and so forth. Furthermore, the control apparatus 42generates a notification signal (second standby signal) for notifyingthat the automated workpiece conveying vehicle 10 is waiting at aposition at which the workpiece 11 can be transferred to the cuttingapparatus 4. The notification signal (second standby signal) generatedby the control apparatus 42 is transmitted from the transmitter 46 tothe control unit 12.

When receiving the notification signal (second standby signal)transmitted from the transmitter 46 of the automated workpiece conveyingvehicle 10, the receiver 134 of the control unit 12 sends it to thecontrol part 132. When checking the notification signal (second standbysignal) from the automated workpiece conveying vehicle 10, the controlpart 132 issues, to the cutting apparatus 4, an instruction to conveythe workpiece 11 from the automated workpiece conveying vehicle 10.Specifically, the control part 132 generates a control signal (secondconveyance instruction signal) equivalent to this instruction and sendsit from the transmitter 136 to the cutting apparatus 4.

When receiving the control signal (second conveyance instruction signal)from the control unit 12, the receiver 98 of the cutting apparatus 4sends it to the control apparatus 96. The control apparatus 96 controlsoperation of the cassette conveying arm 94 and so forth based on thiscontrol signal (second conveyance instruction signal) to carry out thecassette 28 in which the workpiece 11 is housed from the chassis 38 ofthe automated workpiece conveying vehicle 10 and place the cassette 28on the cassette support base 50.

When the conveyance of the cassette 28 to the cutting apparatus 4 hasbeen completed, the control apparatus 96 generates a notification signal(second conveyance completion signal) for notifying that the conveyanceof the cassette 28 to the cutting apparatus 4 has been completed, forexample. The notification signal (second conveyance completion signal)generated by the control apparatus 96 is transmitted from thetransmitter 100 to the control unit 12.

By such a procedure, the workpieces 11 housed in the stock unit 8 can beconveyed to an arbitrary cutting apparatus 4 one by one. Although theprocedure when the workpiece 11 is conveyed to the cutting apparatus 4is mainly described here, the procedure when the cassette 28 iscollected from the cutting apparatus 4, or the like, is also the same.

Furthermore, the above-described procedure can be changed within a rangein which the workpiece 11 can be properly conveyed. For example, pluralsteps included in the above-described procedure may be simultaneouslyexecuted, and the order of the steps may be changed within a range inwhich no trouble is caused in the conveyance of the workpiece 11.Similarly, an arbitrary step may be changed or omitted within a range inwhich no trouble is caused in the conveyance of the workpiece 11.

As described above, the conveyance system 2 according to the presentembodiment includes the conveyance passage 6 set across plural cuttingapparatuses (processing apparatuses) 4, the automated workpiececonveying vehicle 10 including the chassis (workpiece support part) 38,the wheels (travel no mechanism) 40, and the receiver 44, and the stockunit 8 including the cassette conveying arm (workpiece conveying part)30 and the receiver 34.

Thus, the workpiece 11 can be conveyed to each of the plural cuttingapparatuses 4 by conveying the workpiece 11 housed in the cassette(workpiece stocker) 18 to the chassis 38 of the automated workpiececonveying vehicle 10 by the cassette conveying arm 30 and causing thisautomated workpiece conveying vehicle 10 to travel on the conveyancepassage 6. Furthermore, in the conveyance system 2 according to thepresent embodiment, the conveyance passage 6 is set in a space directlyabove the cutting apparatus 4. For this reason, the structures of theside surfaces of each cutting apparatus 4 do not need to be consideredwhen this conveyance passage 6 is designed. That is, construction of theconveyance system 2 becomes easy.

Embodiment 2

In the present embodiment, a conveyance system that treats the cuttingblade 82 and so forth as the target of conveyance in addition to theworkpiece 11 will be described. The basic configuration of theconveyance system according to the present embodiment is the same as thebasic configuration of the conveyance system 2 according toembodiment 1. Thus, a constituent element common to the conveyancesystem 2 of embodiment 1 is given the same numeral, and the detaileddescription is omitted.

FIG. 15 is a functional block diagram illustrating an example of theconnection relationship of a conveyance system 202 according to thepresent embodiment. As illustrated in FIG. 15, the automated workpiececonveying vehicles 10, cutting apparatuses 204, automated bladeconveying vehicles 206, and a stock unit 208 are wirelessly connected tothe control unit 12 of the conveyance system 202 according to thepresent embodiment.

The automated blade conveying vehicle 206 travels on the conveyancepassage 6 (see FIG. 16 and so forth) similarly to the automatedworkpiece conveying vehicle 10 and conveys the cutting blade 82 to eachcutting apparatus 204. The stock unit 208 is configured to be capable ofhousing the cutting blades 82 supplied to the respective cuttingapparatuses 204 in addition to plural workpieces 11.

In FIG. 15, two automated workpiece conveying vehicles 10 a and 10 b,two cutting apparatus 204 a and 204 b, and two automated blade conveyingvehicles 206 a and 206 b are illustrated for convenience of description.However, there is no limit to the number of pieces regarding each ofthem. Furthermore, the control unit 12 may be connected to the automatedworkpiece conveying vehicles 10, the cutting apparatuses 204, theautomated blade conveying vehicles 206, the stock unit 208, and so forthin a wired manner.

FIG. 16 is a side view illustrating a configuration example of the stockunit 208 according to embodiment 2. As illustrated in FIG. 16, the basicconfiguration of the stock unit 208 is the same as the basicconfiguration of the stock unit 8 according to embodiment 1. However, ablade stocker 210 for housing plural cutting blades 82 is disposed inthe stock unit 208 according to the present embodiment.

The blade stocker 210 is formed into a tray shape whose upper surfaceside is segmented into plural regions, for example. The cutting blade 82is housed in each region. Furthermore, near this blade stocker 210, ablade conveying arm (blade conveying part) 212 that conveys the cuttingblade 82 between the blade stocker 210 and the automated blade conveyingvehicle 206 is disposed.

FIG. 17 is a perspective view illustrating a configuration example ofthe automated blade conveying vehicle 206. As illustrated in FIG. 17,the automated blade conveying vehicle 206 includes a chassis (bladesupport part) 214 with a tray shape. Plural recesses 214 a correspondingto the size of the cutting blade 82 are formed on the upper surface sideof the chassis 214 and a blade case 216 that can house the cutting blade82 is disposed in each recess 214 a.

The cutting blade 82 conveyed by the blade conveying arm 212 is placedon the blade case 216 disposed in the recess 214 a of this chassis 214.An information providing part 214 b such as a wireless tag oridentification code is set at a position corresponding to each bladecase 216 (recess 214 a) of the chassis 214. Thus, the cutting blade 82housed in each blade case 216 can be easily identified.

Plural (in the present embodiment, four) wheels (traveling mechanism)218 are attached to the lower surface side of the chassis 214. Eachwheel 218 is coupled to a rotational drive source such as a motor androtates. By rotating these wheels 218 by the rotational drive source,the automated blade conveying vehicle 206 travels on the conveyancepassage 6. As the wheels 218, so-called Mecanum wheels in which pluralinclined barrel-shaped (cylinder-shaped) rotating bodies are attached tothe outer circumferential surface in contact with the conveyance passage6, or the like, can be used.

A control apparatus 220 that controls operation of the automated bladeconveying vehicle 206 is disposed on a side surface of the chassis 214.To this control apparatus 220, a receiver 222 that receives a signal forcontrol (control signal) transmitted from the control unit 12 and atransmitter 224 that transmits a signal for notification (notificationsignal) to the control unit 12 are connected. The control apparatus 220controls the operation (traveling) of the automated blade conveyingvehicle 206 based on the signal received by the receiver 222.Furthermore, the control apparatus 220 transmits a necessary signal tothe control unit 12 through the transmitter 224.

FIG. 18 is a perspective view illustrating the appearance of the cuttingapparatus 204 and so forth. As illustrated in FIG. 18, the basicconfiguration of the cutting apparatus 204 is the same as the basicconfiguration of the cutting apparatus 4 according to embodiment 1.However, in this cutting apparatus 204, two openings 92 d thatvertically penetrate the ceiling 92 a of the cover 92 are further made.Each opening 92 d is formed with a size that allows the cutting blade 82to pass through the opening 92 d.

Furthermore, a blade raising-lowering mechanism 226 for raising andlowering the cutting blade 82 is disposed in each opening 92 d. Theblade raising-lowering mechanism 226 includes a blade holding part 228that holds the cutting blade 82 and raises and lowers this blade holdingpart 228. Thus, when this blade holding part 228 is raised and loweredafter the blade holding part 228 is caused to hold the cutting blade 82,the cutting blade 82 can be conveyed from the outside of the cover 92 tothe inside or be conveyed from the inside of the cover 92 to theoutside.

Over the ceiling 92 a of the cover 92, a blade conveying arm 230 thatconveys the cutting blade 82 between the blade holding part 228 includedin the blade raising-lowering mechanism 226 and the automated bladeconveying vehicle 206 that stops near the blade raising-loweringmechanism 226 is disposed. This blade conveying arm 230 includes a bladegrasping part 230 a that holds the cutting blade 82 and conveys thecutting blade 82 between the automated blade conveying vehicle 206 andthe blade holding part 228 by rotating, raising and lowering this bladegrasping part 230 a.

A blade changer 232 that replaces the cutting blade 82 of the cuttingunit 80 by automatic control is further disposed inside the cover 92 ofthe cutting apparatus 204. The blade changer 232 is connected to thecontrol apparatus 96 together with the blade raising-lowering mechanism226 and the blade conveying arm 230.

FIG. 19 is an exploded perspective view illustrating a configurationexample of the blade changer 232. This blade changer 232 includes afixed plate 234 whose position is fixed relative to the pedestal 48, thecover 92, and so forth, for example. A pair of guide rails 236 that arelong in the X-axis direction are disposed on the lower surface side ofthe fixed plate 234. A moving plate 238 is supported by the guide rails236 in a slidable manner along the X-axis direction.

Brackets 240 corresponding to the shapes of the guide rails 236 aredisposed at end parts of the moving plate 238 in the Y-axis directionand the moving plate 238 is supported by the guide rails 236 with theintermediary of these brackets 240. A nut part 242 is fixed to the uppersurface of the moving plate 238. A ball screw 244 substantially parallelto the X-axis direction is inserted into a screw hole 242 a of the nutpart 242 in a rotatable manner.

A pulse motor 246 is coupled to one end of the ball screw 244. When theball screw 244 is rotated by this pulse motor 246, the moving plate 238moves in the X-axis direction along the guide rails 236. A changersupport structure 248 is fixed to the lower surface side of the movingplate 238.

A pair of nut attaching-detaching mechanisms 250 for attaching anddetaching a fixing nut (not illustrated) that fixes the cutting blade 82to the cutting unit 80 are supported by the changer support structure248. Each nut attaching-detaching mechanism 250 is configured to becapable of moving along the Y-axis direction and rotating around arotation axis parallel to the Y-axis direction. By grasping and rotatingthe fixing nut by this nut attaching-detaching mechanism 250, the fixingnut can be attached to the cutting unit 80 or the fixing nut can bedetached from the cutting unit 80.

Furthermore, a pair of blade replacement mechanisms 252 for replacingthe cutting blade 82 are supported by the changer support structure 248.Each blade replacement mechanism 252 includes a first blade holding part252 a and a second blade holding part 252 b that can each hold thecutting blade 82. This blade replacement mechanism 252 is configured tobe capable of moving along the Y-axis direction and exchanging thepositions of the first blade holding part 252 a and the second bladeholding part 252 b in the X-axis direction.

When the cutting blade 82 is replaced by the blade changer 232, forexample, the cutting blade 82 for replacement held by the blade holdingpart 228 of the blade raising-lowering mechanism 226 is received by thefirst blade holding part 252 a. Then, the fixing nut is detached fromthe cutting unit 80 by the nut attaching-detaching mechanism 250.Furthermore, the cutting blade 82 mounted to the cutting unit 80 isdetached from the cutting unit 80 by the second blade holding part 252b.

Thereafter, the positions of the first blade holding part 252 a and thesecond blade holding part 252 b are exchanged and the cutting blade 82for replacement is attached to the cutting unit 80 by the first bladeholding part 252 a. Then, finally the fixing nut is attached to thecutting unit 80 by the nut attaching-detaching mechanism 250. Thecutting blade 82 previously mounted to the cutting unit 80 istransferred from the second blade holding part 252 b to the bladeholding part 228 of the blade raising-lowering mechanism 226, forexample.

Next, an example of operation and so forth of the conveyance system 202according to the present embodiment will be described. FIG. 20 is afunctional block diagram for explaining the example of operation and soforth of the conveyance system 202. The operation relating to conveyanceof the workpiece 11 is the same as embodiment 1. Therefore, an exampleof operation relating to conveyance of the cutting blade 82 will bemainly described in the present embodiment.

For example, when the situation in which replacement of the cuttingblade 82 is necessary occurs, the control apparatus 96 of the cuttingapparatus 204 generates a notification signal (blade request signal) fornotifying this. The notification signal (blade request signal) generatedby the control apparatus 96 is transmitted from the transmitter 100 tothe control unit 12.

When receiving the notification signal (blade request signal)transmitted from the transmitter 100 of the cutting apparatus 204, thereceiver 134 of the control unit 12 sends it to the control part 132.When checking the notification signal (blade request signal) from thecutting apparatus 204, the control part 132 issues, to the automatedblade conveying vehicle 206, an instruction to wait at a position atwhich the cutting blade 82 can be received from the stock unit 208.Specifically, the control part 132 generates a control signal (firstwait instruction signal) equivalent to this instruction and sends itfrom the transmitter 136 to the automated blade conveying vehicle 206.

When receiving the control signal (first wait instruction signal) fromthe control unit 12, the receiver 222 of the automated blade conveyingvehicle 206 sends it to the control apparatus 220. The control apparatus220 controls operation of the wheels (traveling mechanism) 218 and soforth based on this control signal (first wait instruction signal) andcauses the automated blade conveying vehicle 206 to travel along theconveyance passage 6.

As illustrated in FIG. 20, a reader 254 for reading information of theinformation providing part 102 b set on the conveyance passage 6 isconnected to the control apparatus 220 of the automated blade conveyingvehicle 206. Thus, the control apparatus 220 can check the position ofthe automated blade conveying vehicle 206 by reading the information ofthe information providing part 102 b by the reader 254.

When confirming that the automated blade conveying vehicle 206 has movedto near the stock unit 208, the control apparatus 220 stops the wheels218 and so forth. Furthermore, the control apparatus 220 generates anotification signal (first standby signal) for notifying that theautomated blade conveying vehicle 206 is waiting at a position at whichthe cutting blade 82 can be received. The notification signal (firststandby signal) generated by the control apparatus 220 is transmittedfrom the transmitter 224 to the control unit 12.

When receiving the notification signal (first standby signal)transmitted from the transmitter 224 of the automated blade conveyingvehicle 206, the receiver 134 of the control unit 12 sends it to thecontrol part 132. When checking the notification signal (first standbysignal) from the automated blade conveying vehicle 206, the control part132 issues, to the stock unit 208, an instruction to convey the cuttingblade 82 to the automated blade conveying vehicle 206. Specifically, thecontrol part 132 generates a control signal (first conveyanceinstruction signal) equivalent to this instruction and sends it from thetransmitter 136 to the stock unit 208.

When receiving the control signal (first conveyance instruction signal)from the control unit 12, the receiver 34 of the stock unit 208 sends itto the control apparatus 32. The control apparatus 32 controls operationof the blade conveying arm 212 and so forth based on this control signal(first conveyance instruction signal) to carry out the cutting blade 82from the blade stocker 210 and place the cutting blade 82 on the chassis214 of the automated blade conveying vehicle 206. Specifically, thecutting blade 82 is placed on the blade case 216 indicated from thecontrol unit 12 through the control signal (first conveyance instructionsignal), for example.

When the conveyance of the cutting blade 82 to the automated bladeconveying vehicle 206 has been completed, the control apparatus 32generates a notification signal (first conveyance completion signal) fornotifying that the conveyance of the cutting blade 82 to the automatedblade conveying vehicle 206 has been completed. The notification signal(first conveyance completion signal) generated by the control apparatus32 is transmitted from the transmitter 36 to the control unit 12.

When receiving the notification signal (first conveyance completionsignal) transmitted from the transmitter 36 of the stock unit 208, thereceiver 134 of the control unit 12 sends it to the control part 132.When checking the notification signal (first conveyance completionsignal) from the stock unit 208, the control part 132 issues, to theautomated blade conveying vehicle 206, an instruction to move to aposition at which the cutting blade 82 can be transferred to the cuttingapparatus 204 and wait. Specifically, the control part 132 generates acontrol signal (second wait instruction signal) equivalent to thisinstruction and sends it from the transmitter 136 to the automated bladeconveying vehicle 206.

When receiving the control signal (second wait instruction signal) fromthe control unit 12, the receiver 222 of the automated blade conveyingvehicle 206 sends it to the control apparatus 220. The control apparatus220 controls operation of the wheels 218 and so forth based on thiscontrol signal (second wait instruction signal) and causes the automatedblade conveying vehicle 206 to travel along the conveyance passage 6.

When confirming that the automated blade conveying vehicle 206 has movedto near the cutting apparatus 204, the control apparatus 220 stops thewheels 218 and so forth. Furthermore, the control apparatus 220generates a notification signal (second standby signal) for notifyingthat the automated blade conveying vehicle 206 is waiting at a positionat which the cutting blade 82 can be transferred to the cuttingapparatus 204. The notification signal (second standby signal) generatedby the control apparatus 220 is transmitted from the transmitter 224 tothe control unit 12.

When receiving the notification signal (second standby signal)transmitted from the transmitter 224 of the automated blade conveyingvehicle 206, the receiver 134 of the control unit 12 sends it to thecontrol part 132. When checking the notification signal (second standbysignal) from the automated blade conveying vehicle 206, the control part132 issues, to the cutting apparatus 204, an instruction to convey thecutting blade 82 from the automated blade conveying vehicle 206.Specifically, the control part 132 generates a control signal (secondconveyance instruction signal) equivalent to this instruction and sendsit from the transmitter 136 to the cutting apparatus 204.

When receiving the control signal (second conveyance instruction signal)from the control unit 12, the receiver 98 of the cutting apparatus 204sends it to the control apparatus 96. The control apparatus 96 controlsoperation of the blade conveying arm 230 and so forth based on thiscontrol signal (second conveyance instruction signal) to carry out thecutting blade 82 from the chassis 214 of the automated blade conveyingvehicle 206 and transfer the cutting blade 82 to the blade holding part228. Specifically, the cutting blade 82 in the blade case 216 indicatedfrom the control unit through the control signal (second conveyanceinstruction signal) is carried out to be transferred to the bladeholding part 228.

When the transfer of the cutting blade 82 to the cutting apparatus 204has been completed, the control apparatus 96 generates a notificationsignal (second conveyance completion signal) for notifying that theconveyance of the cutting blade 82 to the cutting apparatus 204 has beencompleted, for example. The notification signal (second conveyancecompletion signal) generated by the control apparatus 96 is transmittedfrom the transmitter 100 to the control unit 12. By such a procedure,the cutting blade 82 housed in the stock unit 208 can be conveyed to thecutting apparatus 204 according to need.

Thereafter, the cutting apparatus 204 transfers the cutting blade 82from the above-described blade holding part 228 to the blade changer232, for example. Then, by this blade changer 232, the used cuttingblade 82 that has been already mounted to the cutting unit 80 arereplaced by the cutting blade 82 received from the blade holding part228.

The used cutting blade 82 detached from the cutting unit 80 istransferred to the blade holding part 228. The blade conveying arm 230places the used cutting blade 82 held by the blade holding part 228 onthe chassis 214 of the automated blade conveying vehicle 206 that iswaiting. At this time, the used cutting blade 82 is placed on the bladecase 216 indicated by the control apparatus 96, for example.

When the conveyance of the used cutting blade 82 to the automated bladeconveying vehicle 206 has been completed, the control apparatus 96generates a notification signal (third conveyance completion signal) fornotifying that the conveyance of the used cutting blade 82 to theautomated blade conveying vehicle 206 has been completed. Thenotification signal (third conveyance completion signal) generated bythe control apparatus 96 is transmitted from the transmitter 100 to thecontrol unit 12. Information on the blade case 216 on which the usedcutting blade 82 is placed (information of the information providingpart 214 b corresponding to the blade case 216) is included in thisnotification signal (third conveyance completion signal).

When receiving the notification signal (third conveyance completionsignal) transmitted from the transmitter 100 of the cutting apparatus204, the receiver 134 of the control unit 12 sends it to the controlpart 132. When checking the notification signal (third conveyancecompletion signal) from the cutting apparatus 204, the control part 132issues, to the automated blade conveying vehicle 206, an instruction tomove to a position at which the used cutting blade 82 can be transferredto the stock unit 208 and wait. Specifically, the control part 132generates a control signal (third wait instruction signal) equivalent tothis instruction and sends it from the transmitter 136 to the automatedblade conveying vehicle 206.

When receiving the control signal (third wait instruction signal) fromthe control unit 12, the receiver 222 of the automated blade conveyingvehicle 206 sends it to the control apparatus 220. The control apparatus220 controls operation of the wheels 218 and so forth based on thiscontrol signal (third wait instruction signal) and causes the automatedblade conveying vehicle 206 to travel along the conveyance passage 6.

When confirming that the automated blade conveying vehicle 206 has movedto near the stock unit 208, the control apparatus 220 stops the wheels218 and so forth. Furthermore, the control apparatus 220 generates anotification signal (third standby signal) for notifying that theautomated blade conveying vehicle 206 is waiting at a position at whichthe used cutting blade 82 can be transferred. The notification signal(third standby signal) generated by the control apparatus 220 istransmitted from the transmitter 224 to the control unit 12.

When receiving the notification signal (third standby signal)transmitted from the transmitter 224 of the automated blade conveyingvehicle 206, the receiver 134 of the control unit 12 sends it to thecontrol part 132. When checking the notification signal (third standbysignal) from the automated blade conveying vehicle 206, the control part132 issues, to the stock unit 208, an instruction to carry out the usedcutting blade 82 from the automated blade conveying vehicle 206.Specifically, the control part 132 generates a control signal (thirdconveyance instruction signal) equivalent to this instruction and sendsit from the transmitter 136 to the stock unit 208.

When receiving the control signal (third conveyance instruction signal)from the control unit 12, the receiver 34 of the stock unit 208 sends itto the control apparatus 32. The control apparatus 32 controls operationof the blade conveying arm 212 and so forth based on this control signal(third conveyance instruction signal) to carry out the used cuttingblade 82 from the chassis 214 of the automated blade conveying vehicle206 and house the used cutting blade 82 to the blade stocker 210.Specifically, the cutting blade 82 in the blade case 216 indicated fromthe control unit 12 through the control signal (third conveyanceinstruction signal) is carried out to be transferred to the bladestocker 210.

By such a procedure, the cutting blade 82 housed in the stock unit 208can be conveyed to the cutting apparatus 204 according to need.Furthermore, the used cutting blade 82 detached from the cutting unit 80of the cutting apparatus 204 can be collected. Here, the automated bladeconveying vehicle 206 is made to wait on the spot during work ofreplacing the cutting blade 82. However, for example, another cuttingblade 82 may be conveyed to another cutting apparatus 204 during thiswork of replacing the cutting blade 82.

Furthermore, the above-described procedure can be changed within a rangein which the cutting blade 82 can be properly conveyed. For example,plural steps included in the above-described procedure may besimultaneously executed and the order of the steps may be changed withina range in which no trouble is caused in the conveyance of the cuttingblade 82. Similarly, an arbitrary step may be changed or omitted withina range in which no trouble is caused in the conveyance of the cuttingblade 82.

As described above, the conveyance system 202 according to the presentembodiment includes the conveyance passage 6 set across plural cuttingapparatuses (processing apparatuses) 204, the automated blade conveyingvehicle 206 including the chassis (blade support part) 214, the wheels(traveling mechanism) 218, and the receiver 222, and the stock unit 208including the blade conveying arm (blade conveying part) 212 and thereceiver 34.

Thus, the cutting blade 82 can be conveyed to each of the plural cuttingapparatuses 204 by conveying the cutting blade 82 housed in the bladestocker 210 to the chassis 214 of the automated blade conveying vehicle206 by the blade conveying arm 212 and causing this automated bladeconveying vehicle 206 to travel on the conveyance passage 6.Furthermore, in the conveyance system 202 according to the presentembodiment, the conveyance passage 6 is set in a space directly abovethe cutting apparatus 204. For this reason, the structures of the sidesurfaces of each cutting apparatus 204 do not need to be considered whenthis conveyance passage 6 is designed. That is, construction of theconveyance system 202 becomes easy.

Embodiment 3

In the present embodiment, an example in which a conveyance mechanismfor conveying the cassette 28 (workpiece 11) to a cutting apparatus isattached to a conveyance passage will be described. The basicconfiguration of the cutting apparatus and the conveyance passage is thesame as embodiments 1 and 2. Thus, a common constituent element is giventhe same numeral, and the detailed description is omitted.

FIG. 21 is a perspective view schematically illustrating how thecassette 28 is carried out from the automated workpiece conveyingvehicle 10 in a conveyance system according to the present embodiment.FIG. 22 is a perspective view schematically illustrating how thecassette 28 is carried in to a cutting apparatus (processing apparatus)304. In FIG. 21 and FIG. 22, the constituent elements inside the cover92 are all omitted.

As illustrated in FIG. 21 and FIG. 22, the cutting apparatus 304 used inthe present embodiment is not equipped with the cassette conveying arm94. Furthermore, in this cutting apparatus 304, the upper surface of thecassette support base 50 does not need to be exposed to the outside ofthe cover 92. Meanwhile, a support structure 306 is fixed to theconveyance passage 6 on the cutting apparatus 304.

A movement mechanism 308 that moves in the horizontal direction isdisposed on the support structure 306. A cassette holding hand 310 thatholds the cassette 28 is disposed at the lower end part of the movementmechanism 308. The cassette holding hand 310 is connected to themovement mechanism 308 in a manner capable of moving up and down like acrane, for example. Furthermore, a camera used in checking whether ornot the cassette 28 is present, the position of the cassette 28, and soforth is disposed on the lower surface side of the cassette holding hand310.

When the cassette 28 is conveyed from the automated workpiece conveyingvehicle 10 to the cutting apparatus 304 in this conveyance system,first, the movement mechanism 308 is positioned above the automatedworkpiece conveying vehicle 10 that is waiting near the cuttingapparatus 304. Next, as illustrated in FIG. 21, the cassette holdinghand 310 is lowered, and the cassette 28 on the automated workpiececonveying vehicle 10 is held by this cassette holding hand 310.

Thereafter, the cassette holding hand 310 is raised. Furthermore, themovement mechanism 308 is moved to above the opening 92 b of the cover92 (i.e. above the cassette support base 50). Then, as illustrated inFIG. 22, the cassette holding hand 310 is lowered and the cassette 28held by this cassette holding hand 310 is placed on the upper surface ofthe cassette support base 50. By the above-described procedure, thecassette 28 can be conveyed from the automated workpiece conveyingvehicle 10 to the cutting apparatus 304.

In the conveyance system of the present embodiment, the conveyancemechanism for conveying the cassette 28 (workpiece 11) to the cuttingapparatus is attached to the conveyance passage 6. Therefore, thecutting apparatus 304 does not need to be equipped with a cassetteconveying arm. Thus, the general versatility of the conveyance systembecomes higher compared with the case in which the cutting apparatus isequipped with the cassette conveying arm, or the like.

The present invention is not limited to the description of the aboveembodiments and can be carried out with various changes. For example,the cutting apparatus 204 of the above embodiment is equipped with theblade raising-lowering mechanism 226 for raising and lowering thecutting blade 82. However, a blade raising-lowering mechanism may beattached to the conveyance passage 6. In this case, the generalversatility of the conveyance system becomes higher compared with thecase in which the cutting apparatus is equipped with the bladeraising-lowering mechanism, or the like.

Furthermore, the conveyance passage 6 may have a space (waiting region)for allowing two automated workpiece conveying vehicles 10 or the liketo pass each other. In addition, the conveyance passage 6 may be set asa so-called one-way passage on which only traveling of the automatedworkpiece conveying vehicle 10 or the like in one direction ispermitted. In this case, the conveyance passage 6 for outward travelingand the conveyance passage 6 for homeward traveling may be set on acutting apparatus (processing apparatus).

Moreover, in the above embodiments, the information providing part 102 bsuch as an identification code or wireless tag is set on the passagepart 102. However, it is also possible to attach an informationproviding part to the guide part 104. In this case, it is preferable toattach the information providing part to a wall surface of the inside ofthe guide part 104, the upper end part of the guide part 104, or thelike, for example.

Besides, structures, methods, and so forth relating to the aboveembodiments, modification examples, and so forth can be implemented withappropriate changes without departing from the range of the object ofthe present invention.

The present invention is not limited to the details of the abovedescribed preferred embodiments. The scope of the invention is definedby the appended claims and all changes and modifications as fall withinthe equivalence of the scope of the claims are therefore to be embracedby the invention.

What is claimed is:
 1. A conveyance system that conveys a workpiece to each of a plurality of processing apparatuses, the conveyance system comprising: a conveyance passage set in a space directly above the processing apparatus across the plurality of processing apparatuses; an automated workpiece conveying vehicle including a workpiece support part that supports the workpiece, a traveling mechanism disposed on the workpiece support part, and a receiver that receives a control signal, the automated workpiece conveying vehicle including the workpiece support part, and the workpiece being positioned above the conveyance passage, the automated workpiece conveying vehicle traveling on an upward facing surface of the conveyance passage; a stock unit including a workpiece conveying part that conveys the workpiece between a workpiece stocker that houses the workpiece to be supplied to the processing apparatus and the automated workpiece conveying vehicle and a receiver that receives a control signal; and a control unit including a transmitter that transmits a control signal to the processing apparatus, the automated workpiece conveying vehicle, and the stock unit, a receiver that receives a notification signal transmitted from the processing apparatus, and a control signal generator that generates the control signal to be transmitted from the transmitter, wherein the control signal generator of the control unit generates the control signal to be transmitted from the transmitter of the control unit based on the notification signal received by the receiver of the control unit, the transmitter of the control unit transmits the control signal generated by the control signal generator of the control unit to the processing apparatus, the automated workpiece conveying vehicle, and the stock unit, the workpiece conveying part of the stock unit conveys the workpiece housed in the workpiece stocker to the workpiece support part of the automated workpiece conveying vehicle based on the control signal received by the receiver of the stock unit, and the traveling mechanism of the automated workpiece conveying vehicle causes the automated workpiece conveying vehicle to travel on the conveyance passage based on the control signal received by the receiver of the automated workpiece conveying vehicle to convey the workpiece supported by the workpiece support part to the processing apparatus.
 2. The conveyance system according to claim 1, wherein the conveyance passage is set on an upper surface of the processing apparatus.
 3. The conveyance system according to claim 1, wherein the conveyance passage is configured by coupling a plurality of passage modules.
 4. The conveyance system according to claim 1, wherein the conveyance passage includes a leg part having a suction adhesion part that adheres to the processing apparatus by suction, and is fixed to the processing apparatus by the suction adhesion part.
 5. The conveyance system according to claim 1, wherein the processing apparatus has a conduit connecting part to which conduits are connected or a door for maintenance on a side surface.
 6. The conveyance system according to claim 1, wherein the conveyance passage has raised sides.
 7. A conveyance system that conveys a workpiece to each of a plurality of processing apparatuses, the conveyance system comprising: a conveyance passage set in a space directly above the processing apparatus across the plurality of processing apparatuses; an automated workpiece conveying vehicle including a workpiece support part that supports the workpiece, a traveling mechanism disposed on the workpiece support part, and a receiver that receives a control signal, the automated workpiece conveying vehicle traveling on the conveyance passage; a stock unit including a workpiece conveying part that conveys the workpiece between a workpiece stocker that houses the workpiece to be supplied to the processing apparatus and the automated workpiece conveying vehicle and a receiver that receives a control signal; and a control unit including a transmitter that transmits a control signal to the processing apparatus, the automated workpiece conveying vehicle, and the stock unit, a receiver that receives a notification signal transmitted from the processing apparatus, and a control signal generator that generates the control signal to be transmitted from the transmitter, wherein the control signal generator of the control unit generates the control signal to be transmitted from the transmitter of the control unit based on the notification signal received by the receiver of the control unit, the transmitter of the control unit transmits the control signal generated by the control signal generator of the control unit to the processing apparatus, the automated workpiece conveying vehicle, and the stock unit, the workpiece conveying part of the stock unit conveys the workpiece housed in the workpiece stocker to the workpiece support part of the automated workpiece conveying vehicle based on the control signal received by the receiver of the stock unit, the traveling mechanism of the automated workpiece conveying vehicle causes the automated workpiece conveying vehicle to travel on the conveyance passage based on the control signal received by the receiver of the automated workpiece conveying vehicle to convey the workpiece supported by the workpiece support part to the processing apparatus, an automated blade conveying vehicle including a blade support part that supports a cutting blade used when the workpiece is processed by the processing apparatus, a traveling mechanism disposed on the blade support part, and a receiver that receives a control signal, the automated blade conveying vehicle traveling on the conveyance passage, wherein the stock unit further includes a blade conveying part that conveys the cutting blade between a blade stocker that houses the cutting blade to be supplied to the processing apparatus and the automated blade conveying vehicle, the transmitter of the control unit further has a function of transmitting the control signal to the automated blade conveying vehicle, the transmitter of the control unit transmits the control signal generated by the control signal generator of the control unit to the processing apparatus, the automated workpiece conveying vehicle, the automated blade conveying vehicle, and the stock unit, the blade conveying part of the stock unit conveys the cutting blade housed in the blade stocker to the blade support part of the automated blade conveying vehicle based on the control signal received by the receiver of the stock unit, and the traveling mechanism of the automated blade conveying vehicle causes the automated blade conveying vehicle to travel on the conveyance passage based on the control signal received by the receiver of the automated blade conveying vehicle to convey the cutting blade supported by the blade support part to the processing apparatus.
 8. The conveyance system according to claim 7, wherein the conveyance passage is set on an upper surface of the processing apparatus.
 9. The conveyance system according to claim 7, wherein the conveyance passage is configured by coupling a plurality of passage modules.
 10. The conveyance system according to claim 7, wherein the conveyance passage includes a leg part having a suction adhesion part that adheres to the processing apparatus by suction, and is fixed to the processing apparatus by the suction adhesion part.
 11. The conveyance system according to claim 7, wherein the processing apparatus has a conduit connecting part to which conduits are connected or a door for maintenance on a side surface.
 12. The conveyance system according to claim 7, wherein the automated workpiece conveying vehicle travels on an upper surface of the conveyance passage.
 13. The conveyance system according to claim 7, wherein the conveyance passage has raised sides. 